Exploration of Novel Silicon Devices Toward the Realization of a MEMS-Based Microsystem for Utilities (Water, Gas, Electrical) Monitoring

Exploration of Novel Silicon Devices Toward the Realization of a MEMS-Based Microsystem for Utilities (Water, Gas, Electrical) Monitoring

Bibliographic Details
Main Author:	Kankanam, Gamage Sisira
Language:	English
Published:	University of Cincinnati / OhioLINK 2001
Subjects:	Flow Sensor Vertical Hall Device Planar Coil Magnetic Sensing Hall Device Planar Coil Assembly
Online Access:	http://rave.ohiolink.edu/etdc/view?acc_num=ucin985901586

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