Exploration of Novel Silicon Devices Toward the Realization of a MEMS-Based Microsystem for Utilities (Water, Gas, Electrical) Monitoring
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| Language: | English |
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University of Cincinnati / OhioLINK
2001
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| Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=ucin985901586 |
| Description not available. |