Fabrication and Characterization of a Pulsed MEMS-based Micro Flow Sensor for Microfluidic Applications

Fabrication and Characterization of a Pulsed MEMS-based Micro Flow Sensor for Microfluidic Applications

Bibliographic Details
Main Author:	Okulan, Nihat
Language:	English
Published:	University of Cincinnati / OhioLINK 2000
Subjects:	mems microfabrication sensor micro system technology characterization
Online Access:	http://rave.ohiolink.edu/etdc/view?acc_num=ucin971724680

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