A Novel Fault Detection and Classification Approach in Semiconductor Manufacturing Using Time Series Alignment Kernel

A Novel Fault Detection and Classification Approach in Semiconductor Manufacturing Using Time Series Alignment Kernel

Bibliographic Details
Main Author:	Zhu, Feng
Language:	English
Published:	University of Cincinnati / OhioLINK 2020
Subjects:	Engineering Semiconductor Time Series Alignment Kernel Sensor Selection Fault Detection and Classification
Online Access:	http://rave.ohiolink.edu/etdc/view?acc_num=ucin1592135306729513

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