Formation of Nano-Sharp Tips and Microbumps on Silicon and Metal Films by Localized Single-Pulse Laser Irradiation

Formation of Nano-Sharp Tips and Microbumps on Silicon and Metal Films by Localized Single-Pulse Laser Irradiation

Bibliographic Details
Main Author:	Moening, Joseph Patrick
Language:	English
Published:	University of Toledo / OhioLINK 2010
Subjects:	Electrical Engineering Engineering Physics Laser modification Nanosecond laser Microstructuring High-aspect ratio Nano-scale Microbump Sharp Protrusion Nano-tip Single-pulse Laser Irradiation
Online Access:	http://rave.ohiolink.edu/etdc/view?acc_num=toledo1279052874

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