Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /

Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /

Bibliographic Details
Main Author: Seiple, Jeffrey Vance
Language:English
Published: The Ohio State University / OhioLINK 1996
Subjects:
Engineering
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=osu1487942476406293
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spelling ndltd-OhioLink-oai-etd.ohiolink.edu-osu14879424764062932021-08-03T06:58:47Z Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces / Seiple, Jeffrey Vance Engineering 1996 English text The Ohio State University / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=osu1487942476406293 http://rave.ohiolink.edu/etdc/view?acc_num=osu1487942476406293 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.
collection NDLTD
language English
sources NDLTD
topic Engineering
spellingShingle Engineering
Seiple, Jeffrey Vance
Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
author Seiple, Jeffrey Vance
author_facet Seiple, Jeffrey Vance
author_sort Seiple, Jeffrey Vance
title Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
title_short Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
title_full Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
title_fullStr Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
title_full_unstemmed Scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
title_sort scanning tunneling microscopy study of oxide cluster nucleation and oxidation-induced etching on silicon surfaces /
publisher The Ohio State University / OhioLINK
publishDate 1996
url http://rave.ohiolink.edu/etdc/view?acc_num=osu1487942476406293
work_keys_str_mv AT seiplejeffreyvance scanningtunnelingmicroscopystudyofoxideclusternucleationandoxidationinducedetchingonsiliconsurfaces
_version_ 1719450707840466944

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