Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator
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The Ohio State University / OhioLINK
2016
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| Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=osu1479676049000194 |
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ndltd-OhioLink-oai-etd.ohiolink.edu-osu14796760490001942021-08-03T06:38:56Z Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator Ren, Yanhai Mechanical Engineering Atomic force microscope is widely applied in biology, tribology, material science and chemistry areas due to its high spatial resolution, flexible working environment and few constraints on sample properties. Due to the geometry of conventional AFM cantilever, however, the accessibility of the probe is greatly limited, resulting artifacts when scanning samples with large geometry variation and constraints on its flexibility when working as a manipulator. In this research, the design and position control of a novel micro-manipulator is proposed which possesses five DOFs, namely three translational and two rotational DOFs. The manipulator can work as a probe for AFM and actively change the tip orientation such that it always aligns along the normal direction of the sample. In this way the accessibility of the tip will be greatly enlarged to reduce imaging artifacts for samples with large surface variation. Furthermore, it can serve as a manipulator to perform machining and manipulation tasks in 3D space at nanoscale. Specifically, the structure design of the five-axis compliant manipulator and the associated magnetic actuation system are presented. The quasi static and dynamic models of the magnetically actuated manipulator are established and the corresponding current and force inverse models are solved and validated based on FE analysis. At last the position controller in both continuous and discrete time domain is advanced based on feedback linearization. The augmented state estimator is designed to estimate the tipsample interaction force during contact phase when AFM works in tapping mode. The estimated force can be further utilized as a feedback signal to form the outer force control loop. The performance of the position controller is validated by transient analysis in ANSYS. 2016 English text The Ohio State University / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=osu1479676049000194 http://rave.ohiolink.edu/etdc/view?acc_num=osu1479676049000194 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws. |
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NDLTD |
| language |
English |
| sources |
NDLTD |
| topic |
Mechanical Engineering |
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Mechanical Engineering Ren, Yanhai Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator |
| author |
Ren, Yanhai |
| author_facet |
Ren, Yanhai |
| author_sort |
Ren, Yanhai |
| title |
Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator |
| title_short |
Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator |
| title_full |
Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator |
| title_fullStr |
Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator |
| title_full_unstemmed |
Design, Modeling and Position Control of a Magnetically Actuated Five-axis Compliant Micro-Manipulator |
| title_sort |
design, modeling and position control of a magnetically actuated five-axis compliant micro-manipulator |
| publisher |
The Ohio State University / OhioLINK |
| publishDate |
2016 |
| url |
http://rave.ohiolink.edu/etdc/view?acc_num=osu1479676049000194 |
| work_keys_str_mv |
AT renyanhai designmodelingandpositioncontrolofamagneticallyactuatedfiveaxiscompliantmicromanipulator |
| _version_ |
1719440843094360064 |