Mechanical Properties of Low- and High-<i>k</i> Dielectric Thin Films by Brillouin Light Scattering
Main Author: | Zizka, Jonathan |
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Language: | English |
Published: |
The Ohio State University / OhioLINK
2016
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Subjects: | |
Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=osu1462806484 |
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