INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD

INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD

Bibliographic Details
Main Author: Zhang, Hao
Language:English
Published: The Ohio State University / OhioLINK 2013
Subjects:
Engineering
3D Micromachining
Optical Engineering
Precision Engineering
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=osu1372250848
id ndltd-OhioLink-oai-etd.ohiolink.edu-osu1372250848
record_format oai_dc
spelling ndltd-OhioLink-oai-etd.ohiolink.edu-osu13722508482021-08-03T05:24:22Z INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD Zhang, Hao Engineering 3D Micromachining Optical Engineering Precision Engineering Conventional micromachining methods often require the use of complex facilities, templates and repeated mechanical alignments. These methods are essentially 2.5D processes. This research is to establish a cost-effective, high precision, 3D micromachining method with high flexibility. To this end, a combination of ultraprecision micromachining and high volume replication methods, such as microinjection molding and 3D photolithographic projection, was investigated. Preliminary study was conducted to investigate the 3D micromachining capability of 3D photolithographic projection method. A 3D microlens array was directly machined by the slow tool servo technique as the projection optic. Patterns on a mask were projected on the photoresist deposited on a curved substrate. After photolithography and thermal reflow process, 3D microlenses formed on the curved substrate. Numerical simulation and experiments were conducted to evaluate process parameters, and the 3D microlenses were evaluated through both geometrical measurements and optical testing, proving they are functional. The 3D photolithography projection method was then utilized to produce a functional device, which was used to control non-planar polymeric surface roughness y generating micro square arrays. Subsequent experimental results using a goniometer showed that this method could create functional microstructures for wettability control on steep curved substrates. The 3D micromachining capability of the microinjection molding method was also investigated. A 3D microlens array on a steep curved substrate was manufactured using this method. The corresponding injection molds were directly machined using a voice coil based fast tool servo technique. Injection molding process parameters were evaluated using both experimental results and numerical simulation. Additionally, both geometrical error and optical performance tests showed that the molded polymer microlens arrays could be used in wide angle imaging applications. Finally, a three-layer, 3D artificial compound eye sensor was manufactured using the microinjection molding method. Each lens array was optimized using ZEMAX software. All three lens array layers were manufactured by the microinjection molding process and two mold inserts were directly machined using slow tool servo. The complete sensor system was tested on a home-built optical setup using different targets to show that the 3D compound eye was fully functional. Lastly, the imaging application of the 3D compound eye was also investigated. The test results showed its superiorities in wide angle imaging applications. This study demonstrates that a combination of ultraprecision diamond machining and high volume replication methods is an effective approach for manufacturing complex 3D micro structures on curved substrates of low cost, high precision and high efficiency. This method provides a cost-effective solution for industrial high volume production. 2013-08-29 English text The Ohio State University / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=osu1372250848 http://rave.ohiolink.edu/etdc/view?acc_num=osu1372250848 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.
collection NDLTD
language English
sources NDLTD
topic Engineering
3D Micromachining
Optical Engineering
Precision Engineering
spellingShingle Engineering
3D Micromachining
Optical Engineering
Precision Engineering
Zhang, Hao
INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD
author Zhang, Hao
author_facet Zhang, Hao
author_sort Zhang, Hao
title INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD
title_short INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD
title_full INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD
title_fullStr INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD
title_full_unstemmed INVESTIGATION TO A COST-EFFECTIVE 3D MICROMACHINING METHOD
title_sort investigation to a cost-effective 3d micromachining method
publisher The Ohio State University / OhioLINK
publishDate 2013
url http://rave.ohiolink.edu/etdc/view?acc_num=osu1372250848
work_keys_str_mv AT zhanghao investigationtoacosteffective3dmicromachiningmethod
_version_ 1719419820841107456

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