Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions
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Ohio University / OhioLINK
2013
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| Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1373458861 |
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ndltd-OhioLink-oai-etd.ohiolink.edu-ohiou13734588612021-08-03T06:18:26Z Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions Cooper, Kevin W. Physics Condensed Matter Physics DLC magnetron sputtering RBS FRES ERD carbon thin films Seebeck coefficient electronic characterization DLC thin films were fabricated under high vacuum and ultra-high vacuum conditions using Type II UBM sputtering with a graphite target. Ultra-high purity argon sputtering gas at nominally 2.8 - 3.0 mtorr was used as a working gas during deposition. Film thickness and elemental composition was determined through a combination of Rutherford Backscattering and Forward Recoil Elastic Scattering spectroscopy at Ohio University using the 4.5 MV tandem particle accelerator at Edwards Accelerator Laboratory. Electronic characterization of the films consisted of measurements of room and low temperature current-voltage curves, temperature dependent conductivity, Seebeck coefficient, and the temperature dependent Seebeck coefficient. Hydrogen concentration profiles of the films indicated a three layer structure: surface, bulk, and interface. Total hydrogen concentration in the film was reduced to 3 at.% for the films with lowest hydrogen content. This low-level of hydrogen content was achieved through UHV base chamber pressure, pre-sputtering of the graphite target, and the use of a hydrogen filter on the UHP argon supply line.The films exhibited linear current-voltage relations in both high and low temperature regimes. A thermally assisted conduction relationship in temperature dependent conductivity was observed. Nominal film conductivity was measured to be ~2 - 3 S/cm.Measurements of the Seebeck coefficient indicated a p-type material with values of the coefficient ~10 uV/K. The Seebeck coefficient was found to have a weak linear dependence on temperature indicative of a diffusive thermopower relationship. Measurements of the electronic properties as a function of hydrogen concentration indicated at most a weak relationship over the range of the low hydrogen concentrations in this work. 2013-09-24 English text Ohio University / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1373458861 http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1373458861 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws. |
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NDLTD |
| language |
English |
| sources |
NDLTD |
| topic |
Physics Condensed Matter Physics DLC magnetron sputtering RBS FRES ERD carbon thin films Seebeck coefficient electronic characterization |
| spellingShingle |
Physics Condensed Matter Physics DLC magnetron sputtering RBS FRES ERD carbon thin films Seebeck coefficient electronic characterization Cooper, Kevin W. Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions |
| author |
Cooper, Kevin W. |
| author_facet |
Cooper, Kevin W. |
| author_sort |
Cooper, Kevin W. |
| title |
Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions |
| title_short |
Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions |
| title_full |
Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions |
| title_fullStr |
Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions |
| title_full_unstemmed |
Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions |
| title_sort |
characterization of diamond like carbon thin films fabricated by unbalanced magnetron sputtering under ultra-high vacuum conditions |
| publisher |
Ohio University / OhioLINK |
| publishDate |
2013 |
| url |
http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1373458861 |
| work_keys_str_mv |
AT cooperkevinw characterizationofdiamondlikecarbonthinfilmsfabricatedbyunbalancedmagnetronsputteringunderultrahighvacuumconditions |
| _version_ |
1719434392572526592 |