Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions

Characterization of Diamond Like Carbon Thin Films Fabricated by Unbalanced Magnetron Sputtering under Ultra-High Vacuum Conditions

Bibliographic Details
Main Author: Cooper, Kevin W.
Language:English
Published: Ohio University / OhioLINK 2013
Subjects:
Physics
Condensed Matter Physics
DLC
magnetron sputtering
RBS
FRES
ERD
carbon thin films
Seebeck coefficient
electronic characterization
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1373458861

Internet

http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1373458861

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