Process Development of a-ZnO Nanoscale Membrane Waveguides

Process Development of a-ZnO Nanoscale Membrane Waveguides

Bibliographic Details
Main Author: Rajan, Parthiban
Language:English
Published: Ohio University / OhioLINK 2012
Subjects:
Electrical Engineering
Optics
waveguide
membrane
LOOM
sensor
amorphous ZnO
fabrication
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1343924252
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spelling ndltd-OhioLink-oai-etd.ohiolink.edu-ohiou13439242522021-08-03T05:47:33Z Process Development of a-ZnO Nanoscale Membrane Waveguides Rajan, Parthiban Electrical Engineering Optics waveguide membrane LOOM sensor amorphous ZnO fabrication The waveguide fabricated in this thesis is an important component of a chemical sensor. Ammonia is a very toxic gas causing health hazards and pollution which has an absorption peak at 550 nm. The low optical overlap mode (LOOM) structure is fabricated using a-ZnO, which is lossless at this wavelength. With more than 99% of mode outside the core region, the LOOM waveguide built using a-ZnO as core helps in increasing the sensitivity to detect ammonia. Fabrication of such a nanoscale waveguide is a challenging task and this thesis aims at fabricating such a waveguide. The LOOM structure is used in this work has shown to greatly increase the sensitivity of the chemical sensor when compared to conventional evanescent wave sensors. Based on previous modeling, the process to develop a 20 nm thick a-ZnO membrane with a 20 nm thick and 2 µm wide rib must be done with very high precision. This is required because a change in thickness of the rib or the membrane to rib ratio would cause the TM LOOM mode to become unguided. So a complete fabrication procedure which includes photo mask design, photolithography, etching techniques which includes both the wet etching and dry etching methods, and CO2 supercritical drying for membrane release are explained in this thesis. 2012-09-11 English text Ohio University / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1343924252 http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1343924252 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.
collection NDLTD
language English
sources NDLTD
topic Electrical Engineering
Optics
waveguide
membrane
LOOM
sensor
amorphous ZnO
fabrication
spellingShingle Electrical Engineering
Optics
waveguide
membrane
LOOM
sensor
amorphous ZnO
fabrication
Rajan, Parthiban
Process Development of a-ZnO Nanoscale Membrane Waveguides
author Rajan, Parthiban
author_facet Rajan, Parthiban
author_sort Rajan, Parthiban
title Process Development of a-ZnO Nanoscale Membrane Waveguides
title_short Process Development of a-ZnO Nanoscale Membrane Waveguides
title_full Process Development of a-ZnO Nanoscale Membrane Waveguides
title_fullStr Process Development of a-ZnO Nanoscale Membrane Waveguides
title_full_unstemmed Process Development of a-ZnO Nanoscale Membrane Waveguides
title_sort process development of a-zno nanoscale membrane waveguides
publisher Ohio University / OhioLINK
publishDate 2012
url http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1343924252
work_keys_str_mv AT rajanparthiban processdevelopmentofaznonanoscalemembranewaveguides
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