Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2

Bibliographic Details
Main Author: Beyer, Griffin Joseph
Language:English
Published: University of Dayton / OhioLINK 2020
Subjects:
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=dayton1582624657416084
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spelling ndltd-OhioLink-oai-etd.ohiolink.edu-dayton15826246574160842021-08-03T07:13:56Z Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2 Beyer, Griffin Joseph Biomedical Engineering Chemical Engineering Physics Materials Science MoS2 Photonic Annealing Electronic Molecular Recognition Vapor Sensor TMDs Development of sensitive and selective electronic molecular sensors is an area of interest for healthcare, industrial safety, law enforcement, national security, and human performance applications. Electronic sensors demonstrate potential benefits of portability, low power consumption, quick response times, and high sensitivity. Two-dimensional transition metal dichalcogenides (2D TMDs) have the potential to revolutionize electronic chemical sensing due to the unique combination of physical, mechanical, and electronic characteristics they possess. However, scaling up 2D TMD materials synthesis for devices remains a major obstacle in realizing their benefits in applications such as molecular sensing. In this work, a novel sensor fabrication technique using photonic annealing of amorphous MoS2 sputtered over large areas >1cm2 is investigated. Sensors for detection of NH3, NO2, methacrolein, and water vapors are demonstrated. Correlations of device sensitivity to the structure and properties of the 2D TMD transducer are presented. The sensor devices fabricated on the centimeter scale with this novel technique demonstrate performance comparable to traditional nanoscale devices, yet, are amenable for commercialization and utilization in application areas of interest. 2020-06-15 English text University of Dayton / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=dayton1582624657416084 http://rave.ohiolink.edu/etdc/view?acc_num=dayton1582624657416084 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.
collection NDLTD
language English
sources NDLTD
topic Biomedical Engineering
Chemical Engineering
Physics
Materials Science
MoS2
Photonic Annealing
Electronic Molecular Recognition
Vapor Sensor
TMDs
spellingShingle Biomedical Engineering
Chemical Engineering
Physics
Materials Science
MoS2
Photonic Annealing
Electronic Molecular Recognition
Vapor Sensor
TMDs
Beyer, Griffin Joseph
Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
author Beyer, Griffin Joseph
author_facet Beyer, Griffin Joseph
author_sort Beyer, Griffin Joseph
title Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
title_short Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
title_full Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
title_fullStr Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
title_full_unstemmed Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2
title_sort large area 2d electronic molecular sensor arrays via photonic annealing of amorphous sputtered mos2
publisher University of Dayton / OhioLINK
publishDate 2020
url http://rave.ohiolink.edu/etdc/view?acc_num=dayton1582624657416084
work_keys_str_mv AT beyergriffinjoseph largearea2delectronicmolecularsensorarraysviaphotonicannealingofamorphoussputteredmos2
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