Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2)
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Case Western Reserve University School of Graduate Studies / OhioLINK
2016
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| Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=case1459776436 |
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ndltd-OhioLink-oai-etd.ohiolink.edu-case14597764362021-08-03T06:35:19Z Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) Yang, Rui Electrical Engineering Nanotechnology 2D Semiconductor MoS2 2D NEMS Resonator 2D Field-Effect Transistor Electrical Readout Optical Interferometry Dry Transfer Electromechanical Coupling The discovery of two-dimensional (2D) materials has attracted tremendous interest and led to a great deal of investment due to their unique properties that are not present in three-dimensional (3D) or one-dimensional (1D) materials. Though graphene as the flagship 2D material has been extensively studied, it is a semimetal without a natural bandgap, and the difficulties in creating a useful bandgap has limited its applications in logic circuits, photonic devices and tunable devices. 2D semiconductors such as molybdenum disulfide (MoS2) compensate for graphene because they have a natural sizable bandgap, and thus can largely extend the applications of 2D materials. In order to fully exploit the distinct properties of these 2D semiconductors toward advantageous performance as applicable devices, it would be ideal to synthetically consider the electronic, mechanical, and optical properties of these materials. While MoS2 field-effect transistors (FETs), nanoelectromechanical systems (NEMS), and optoelectronic devices have been demonstrated, there are still numerous problems that need to be solved before applying the devices for sensing, computing, and communication applications that require high performance (sensitivity, reliability, responsivity, etc.). In this dissertation, state-of-the-art studies of MoS2 electronics are first introduced and surveyed. The electrical breakdown limit of MoS2 FETs is investigated because it determines the current carrying capability and failure modes, which are critical for integrated circuit applications. A completely-dry transfer method combined with vacuum thermal annealing is developed to fully harness the intrinsic properties of MoS2 without inducing residue on the surface. Then the mechanical properties and devices of MoS2 are presented. The first MoS2 nanomechanical resonator on a flexible PDMS substrate that is tolerant to a large amount of bending and straining is demonstrated, showing promise for flexible and foldable electronics. The temperature dependence of MoS2 resonators is also studied. Finally, the coupling of electrical and mechanical properties of MoS2 are explored using the first all-electrical readout of 1-, 2-, 3-layer MoS2 NEMS resonators, with the thickness confirmed with both Raman and photoluminescence (PL) characterization. The devices take the form of vibrating-channel transistors, with multimode resonances highly tunable by the gate voltage, which holds promises and intriguing potential for real-time sensing and signal processing applications. 2016-05-31 English text Case Western Reserve University School of Graduate Studies / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=case1459776436 http://rave.ohiolink.edu/etdc/view?acc_num=case1459776436 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws. |
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NDLTD |
| language |
English |
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NDLTD |
| topic |
Electrical Engineering Nanotechnology 2D Semiconductor MoS2 2D NEMS Resonator 2D Field-Effect Transistor Electrical Readout Optical Interferometry Dry Transfer Electromechanical Coupling |
| spellingShingle |
Electrical Engineering Nanotechnology 2D Semiconductor MoS2 2D NEMS Resonator 2D Field-Effect Transistor Electrical Readout Optical Interferometry Dry Transfer Electromechanical Coupling Yang, Rui Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) |
| author |
Yang, Rui |
| author_facet |
Yang, Rui |
| author_sort |
Yang, Rui |
| title |
Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) |
| title_short |
Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) |
| title_full |
Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) |
| title_fullStr |
Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) |
| title_full_unstemmed |
Coupling Two-Dimensional (2D) Nanoelectromechanical Systems (NEMS) with Electronic and Optical Properties of Atomic Layer Molybdenum Disulfide (MoS2) |
| title_sort |
coupling two-dimensional (2d) nanoelectromechanical systems (nems) with electronic and optical properties of atomic layer molybdenum disulfide (mos2) |
| publisher |
Case Western Reserve University School of Graduate Studies / OhioLINK |
| publishDate |
2016 |
| url |
http://rave.ohiolink.edu/etdc/view?acc_num=case1459776436 |
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AT yangrui couplingtwodimensional2dnanoelectromechanicalsystemsnemswithelectronicandopticalpropertiesofatomiclayermolybdenumdisulfidemos2 |
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