Roller-Cast Poly-Dimethylsiloxane as a Non-Hermetic Encapsulant for MEMS Packaging

Roller-Cast Poly-Dimethylsiloxane as a Non-Hermetic Encapsulant for MEMS Packaging

Bibliographic Details
Main Author:	Lachhman, Shem Benjamin
Language:	English
Published:	Case Western Reserve University School of Graduate Studies / OhioLINK 2012
Subjects:	Electrical Engineering
Online Access:	http://rave.ohiolink.edu/etdc/view?acc_num=case1323445335

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