PHYSICAL AND CHEMICAL PROPERTIES OF AMBIENT TEMPERATURE SPUTTERED SILICON CARBIDE FILMS

Bibliographic Details
Main Author: Shelberg, Daniel Thomas
Language:English
Published: Case Western Reserve University School of Graduate Studies / OhioLINK 2010
Subjects:
SiC
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=case1269963941

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