PHYSICAL AND CHEMICAL PROPERTIES OF AMBIENT TEMPERATURE SPUTTERED SILICON CARBIDE FILMS
Main Author: | Shelberg, Daniel Thomas |
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Language: | English |
Published: |
Case Western Reserve University School of Graduate Studies / OhioLINK
2010
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Subjects: | |
Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=case1269963941 |
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