Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

Graduation date: 1994

Bibliographic Details
Main Author: Hsu, Chia-Chang, 1967-
Other Authors: Kimura, Shoichi
Language:en_US
Published: 2013
Subjects:
Silicon compounds > Reactivity
Fluidized reactors
Online Access:http://hdl.handle.net/1957/36293
id ndltd-ORGSU-oai-ir.library.oregonstate.edu-1957-36293
record_format oai_dc
spelling ndltd-ORGSU-oai-ir.library.oregonstate.edu-1957-362932013-01-24T03:17:38ZKinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactorHsu, Chia-Chang, 1967-Silicon compounds -- ReactivityFluidized reactorsGraduation date: 1994Kimura, Shoichi2013-01-23T21:24:52Z2013-01-23T21:24:52Z1993-12-011993-12-01Thesis/Dissertationhttp://hdl.handle.net/1957/36293en_US
collection NDLTD
language en_US
sources NDLTD
topic Silicon compounds -- Reactivity
Fluidized reactors
spellingShingle Silicon compounds -- Reactivity
Fluidized reactors
Hsu, Chia-Chang, 1967-
Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor
description Graduation date: 1994
author2 Kimura, Shoichi
author_facet Kimura, Shoichi
Hsu, Chia-Chang, 1967-
author Hsu, Chia-Chang, 1967-
author_sort Hsu, Chia-Chang, 1967-
title Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor
title_short Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor
title_full Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor
title_fullStr Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor
title_full_unstemmed Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor
title_sort kinetic study of si(nh) synthesis via low temperature vapor phase reaction of sicl and nh in a fluidized bed reactor
publishDate 2013
url http://hdl.handle.net/1957/36293
work_keys_str_mv AT hsuchiachang1967 kineticstudyofsinhsynthesisvialowtemperaturevaporphasereactionofsiclandnhinafluidizedbedreactor
_version_ 1716575854361837568

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