Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

• Main Author: Hsu, Chia-Chang, 1967-
• Other Authors: Kimura, Shoichi
• Language: en_US
• Published: 2013
• Subjects: Silicon compounds > Reactivity; Fluidized reactors
• Online Access: http://hdl.handle.net/1957/36293

Graduation date: 1994