Fluidized-bed nitridation of silicon : direct use of very fine powder for [��]-silicon nitride production
2 ��m average sized silicon powder was nitrided with 90% N���/10% H��� in a fluidized-bed reactor, operated at 1200��C, 1250��C and 1300��C. To fluidize silicon powder, alumina particles with an average size of 300 ��m were used as an inert fluidizing conditioner. The feasibility and operating condi...
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| Language: | en_US |
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2012
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| Online Access: | http://hdl.handle.net/1957/34388 |