Micro and nano electromechanical systems for near-zero power infrared detection

• Online Access: http://hdl.handle.net/2047/D20254474

Light is one of the most important tools for human beings to probe and sense the physical world. Infrared (IR) radiation located in longer wavelengths than those of visible light carries rich information of an environment as it reveals the temperature distribution and chemical composition of objects. In addition, it has been utilized for communication and distance measurement owing to the atmospheric window and insensitiveness of human eyes to the IR radiation. As a result, IR detectors nowadays can be found in a wide variety of applications, including thermal imaging, automotive night vision, standoff chemical detection, remote control and laser ranging, just to mention a few. On the other hand, due to the recent fast development of the Internet of Things (IoT), there is a growing demand for miniaturized and power efficient unattended sensors that can be widely distributed in large volumes to form a wireless sensor networks capable of monitoring the environment with high accuracy and long lifetime. In this context, micro and nano electromechanical systems (MEMS/NEMS) may provide a huge impact, since they can be used for the implementation of miniaturized, low power, high-performance sensors and wireless communication devices fully compatible with standard integrated circuitry.