Silicon oxide micromodule capacitors

Silicon oxide capacitors have been developed on micromodule wafers (0.310-in. sq. with three termination notches per side). Each microelement contains 1, 2, 3, or 4 capacitors with values of 1120 and 560, 180, 100 and 68 pf per capacitor, respectively. The 1120 pf capacitor is double layered. In add...

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Online Access:http://hdl.handle.net/2047/d20000724