| Summary: | Nanocrystalline films of the Ni<sub>1</sub><sub>1</sub>Co<sub>1</sub><sub>1</sub>Fe<sub>6</sub><sub>7</sub><sub>-</sub><sub>x</sub>Zr<sub>7</sub>B<sub>4</sub>Cux (x=0,1) composition were deposited on fused quartz substrates by pulsed laser deposition. For the films ofNi<sub>1</sub><sub>1</sub>Co<sub>1</sub><sub>1</sub>Fe<sub>6</sub><sub>6</sub>Zr<sub>7</sub>B<sub>4</sub>Cu, the bcc grain size ranged from 5 to 8 nm in the films deposited at substrate temperatures from ambient to 300°C. Films grown at a substrate temperature of 300°C were found to have optimal magnetic properties including minima in the coercivity and ferromagnetic resonance (FMR) linewidth. The magnetic characterization studies showed coercivity Hc < 5 Oe, 4πMs ∽16 kG, and in-plane uniaxial anisotropy field (HA)∽25-30 Oe. The ferromagnetic resonance linewidth was measured to be 34 Oe and zero magnetic field ferromagnetic resonance at ∽2 GHz. These properties allow these films to be candidates for magnetic planar inductors operating from 0.5 to 2 GHz.
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