MEMS testbed for accelerated testing of nanoelements
Three types of MEMS devices were designed, modeled and fabricated. These devices consisted of microhotplates, resonators (angular and horizontal) and uniaxial tensile testers. Different types of test specimens such as metallic thin films, metallic nanowires and electrospun polymer nanofibers were de...
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| Online Access: | http://hdl.handle.net/2047/d10017288 |