Graphene-aluminum nitride nano plate resonators
The physical and electrical properties of the metal electrodes fundamentally limit volume and frequency scaling of conventional Micro and Nano Electro Mechanical Systems (MEMS/NEMS) piezoelectric resonators. Furthermore, it has been shown that metal electrode damping and interface strain are respons...
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| Online Access: | http://hdl.handle.net/2047/d20003354 |