Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature

Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature

Bibliographic Details
Main Authors:	Tanaka, Yasunori, Yokomizu, Yasunobu, Ishikawa, Motohiro, Matsumura, Toshiro
Language:	en
Published:	IEEE 1997
Subjects:	Excitation temperature high-pressure SF_6 plasma two-temperature state
Online Access:	http://hdl.handle.net/2237/7280

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