Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature

Bibliographic Details
Main Authors: Tanaka, Yasunori, Yokomizu, Yasunobu, Ishikawa, Motohiro, Matsumura, Toshiro
Language:en
Published: IEEE 1997
Subjects:
Online Access:http://hdl.handle.net/2237/7280
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spelling ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-72802013-01-07T23:52:25ZParticle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas TemperatureTanaka, YasunoriYokomizu, YasunobuIshikawa, MotohiroMatsumura, ToshiroExcitation temperaturehigh-pressureSF_6 plasmatwo-temperature stateIEEE1997-10Article(publisher)http://hdl.handle.net/2237/72800093-3813IEEE Transactions on Plasma Science. v.25, n.5, 1997, p.991-995enCopyright © 1997 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
collection NDLTD
language en
sources NDLTD
topic Excitation temperature
high-pressure
SF_6 plasma
two-temperature state
spellingShingle Excitation temperature
high-pressure
SF_6 plasma
two-temperature state
Tanaka, Yasunori
Yokomizu, Yasunobu
Ishikawa, Motohiro
Matsumura, Toshiro
Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature
author Tanaka, Yasunori
Yokomizu, Yasunobu
Ishikawa, Motohiro
Matsumura, Toshiro
author_facet Tanaka, Yasunori
Yokomizu, Yasunobu
Ishikawa, Motohiro
Matsumura, Toshiro
author_sort Tanaka, Yasunori
title Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature
title_short Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature
title_full Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature
title_fullStr Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature
title_full_unstemmed Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature
title_sort particle composition of high-pressure sf_6 plasma with electron temperature greater than gas temperature
publisher IEEE
publishDate 1997
url http://hdl.handle.net/2237/7280
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AT ishikawamotohiro particlecompositionofhighpressuresf6plasmawithelectrontemperaturegreaterthangastemperature
AT matsumuratoshiro particlecompositionofhighpressuresf6plasmawithelectrontemperaturegreaterthangastemperature
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