High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit

Bibliographic Details
Main Authors:	Razzak, M. A., Suzuki, Y., Takamura, S., Uesugi, Y.
Language:	en
Published:	IEEE 2004
Online Access:	http://dx.doi.org/10.1109/PLASMA.2004.1339985 http://hdl.handle.net/2237/7108

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spelling	ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-71082013-01-07T23:51:59ZHigh Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance CircuitRazzak, M. A.Suzuki, Y.Takamura, S.Uesugi, Y.IEEE2004Article(publisher)http://dx.doi.org/10.1109/PLASMA.2004.1339985http://hdl.handle.net/2237/71080730-9244Plasma Science, 2004. ICOPS 2004. p.305enCopyright © 2004 IEEE. Reprinted from Plasma Science, 2004. ICOPS 2004. p.305. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
collection	NDLTD
language	en
sources	NDLTD
author	Razzak, M. A. Suzuki, Y. Takamura, S. Uesugi, Y.
spellingShingle	Razzak, M. A. Suzuki, Y. Takamura, S. Uesugi, Y. High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit
author_facet	Razzak, M. A. Suzuki, Y. Takamura, S. Uesugi, Y.
author_sort	Razzak, M. A.
title	High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit
title_short	High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit
title_full	High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit
title_fullStr	High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit
title_full_unstemmed	High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit
title_sort	high pressure radio frequency induction thermal plasma generation using t-lcl immittance circuit
publisher	IEEE
publishDate	2004
url	http://dx.doi.org/10.1109/PLASMA.2004.1339985 http://hdl.handle.net/2237/7108
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High Pressure Radio Frequency Induction Thermal Plasma Generation Using T-LCL Immittance Circuit

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