Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor
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American Institute of Physics
1997
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| Online Access: | http://dx.doi.org/10.1063/1.365715 http://hdl.handle.net/2237/7026 |
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ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-7026 |
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ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-70262013-01-07T23:52:25ZEffects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactorIkeda, M.Ito, H.Hiramatsu, M.Hori, M.Goto, T.American Institute of Physics1997-10-15Article(publisher)http://dx.doi.org/10.1063/1.365715http://hdl.handle.net/2237/70260021-8979Journal of Applied Physics. v.82, n.8, 1997, p.4055-4061enCopyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. |
| collection |
NDLTD |
| language |
en |
| sources |
NDLTD |
| author |
Ikeda, M. Ito, H. Hiramatsu, M. Hori, M. Goto, T. |
| spellingShingle |
Ikeda, M. Ito, H. Hiramatsu, M. Hori, M. Goto, T. Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| author_facet |
Ikeda, M. Ito, H. Hiramatsu, M. Hori, M. Goto, T. |
| author_sort |
Ikeda, M. |
| title |
Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| title_short |
Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| title_full |
Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| title_fullStr |
Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| title_full_unstemmed |
Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| title_sort |
effects of h, oh, and ch_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor |
| publisher |
American Institute of Physics |
| publishDate |
1997 |
| url |
http://dx.doi.org/10.1063/1.365715 http://hdl.handle.net/2237/7026 |
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