Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage

Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage

名古屋大学博士学位論文 学位の種類:博士(工学) (課程) 学位授与年月日:平成24年3月26日

Bibliographic Details
Main Authors: 山本, 洋, YAMAMOTO, Hiroshi
Language:en
Published: 2012
Online Access:http://hdl.handle.net/2237/16473
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spelling ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-164732013-01-07T23:50:46ZStudies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage山本, 洋YAMAMOTO, Hiroshi名古屋大学博士学位論文 学位の種類:博士(工学) (課程) 学位授与年月日:平成24年3月26日2012-03-26Thesishttp://hdl.handle.net/2237/16473en
collection NDLTD
language en
sources NDLTD
description 名古屋大学博士学位論文 学位の種類:博士(工学) (課程) 学位授与年月日:平成24年3月26日
author 山本, 洋
YAMAMOTO, Hiroshi
spellingShingle 山本, 洋
YAMAMOTO, Hiroshi
Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage
author_facet 山本, 洋
YAMAMOTO, Hiroshi
author_sort 山本, 洋
title Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage
title_short Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage
title_full Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage
title_fullStr Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage
title_full_unstemmed Studies on Plasma Etching Process of Low Dielectrics for Fine Pattern Profile Control with Less Damage
title_sort studies on plasma etching process of low dielectrics for fine pattern profile control with less damage
publishDate 2012
url http://hdl.handle.net/2237/16473
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AT yamamotohiroshi studiesonplasmaetchingprocessoflowdielectricsforfinepatternprofilecontrolwithlessdamage
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