Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror

Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror

This thesis outlines a numerical modeling method to describe the deflection behavior and investigate control schemes for an electrostatically actuated deformable membrane mirror, with application to focus control and aberration correction in micrelectromechanical systems. The physics of the membrane...

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Bibliographic Details
Main Author:	Moog, Eric John
Language:	en
Published:	2011
Online Access:	http://etd.lib.montana.edu/etd/2011/moog/MoogE0811.pdf

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