Magnetic bearing stages for electron beam lithography

Magnetic bearing stages for electron beam lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. === Includes bibliographical references (p. 217-220). === by Paul Thomas Konkola. === S.M.

Bibliographic Details
Main Author: Konkola, Paul Thomas, 1973-
Other Authors: David L. Trumper.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/9315

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