Magnetic bearing stages for electron beam lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. === Includes bibliographical references (p. 217-220). === by Paul Thomas Konkola. === S.M.

Bibliographic Details
Main Author:	Konkola, Paul Thomas, 1973-
Other Authors:	David L. Trumper.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/9315

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record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-93152019-05-02T16:15:54Z Magnetic bearing stages for electron beam lithography Konkola, Paul Thomas, 1973- David L. Trumper. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Mechanical Engineering. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. Includes bibliographical references (p. 217-220). by Paul Thomas Konkola. S.M. 2005-08-22T20:15:53Z 2005-08-22T20:15:53Z 1998 1998 Thesis http://hdl.handle.net/1721.1/9315 44021880 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 230 p. 14041316 bytes 14041076 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Mechanical Engineering.
spellingShingle	Mechanical Engineering. Konkola, Paul Thomas, 1973- Magnetic bearing stages for electron beam lithography
description	Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. === Includes bibliographical references (p. 217-220). === by Paul Thomas Konkola. === S.M.
author2	David L. Trumper.
author_facet	David L. Trumper. Konkola, Paul Thomas, 1973-
author	Konkola, Paul Thomas, 1973-
author_sort	Konkola, Paul Thomas, 1973-
title	Magnetic bearing stages for electron beam lithography
title_short	Magnetic bearing stages for electron beam lithography
title_full	Magnetic bearing stages for electron beam lithography
title_fullStr	Magnetic bearing stages for electron beam lithography
title_full_unstemmed	Magnetic bearing stages for electron beam lithography
title_sort	magnetic bearing stages for electron beam lithography
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/9315
work_keys_str_mv	AT konkolapaulthomas1973 magneticbearingstagesforelectronbeamlithography
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Magnetic bearing stages for electron beam lithography

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