Magnetic bearing stages for electron beam lithography
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. === Includes bibliographical references (p. 217-220). === by Paul Thomas Konkola. === S.M.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/9315 |
| Summary: | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. === Includes bibliographical references (p. 217-220). === by Paul Thomas Konkola. === S.M. |
|---|