Calibration of a microvision system for MEMS device characterization
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. === Includes bibliographical references (leaves 56-57). === With the growing use of microelectromechanical systems (MEMS), it becomes increasingly important that reliable, accurate met...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8934 |