Design of a precision chemical mechanical planarization research system

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. === Includes bibliographical references (leaf 208). === by Fardad Ali Hashemi. === S.M.

Bibliographic Details
Main Author:	Hashemi, Fardad Ali, 1976-
Other Authors:	Ernesto E. Blanco.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2014
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/89285

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-89285
record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-892852019-05-02T15:59:24Z Design of a precision chemical mechanical planarization research system Hashemi, Fardad Ali, 1976- Ernesto E. Blanco. Massachusetts Institute of Technology. Department of Mechanical Engineering. Massachusetts Institute of Technology. Department of Mechanical Engineering. Mechanical Engineering. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. Includes bibliographical references (leaf 208). by Fardad Ali Hashemi. S.M. 2014-09-09T17:51:41Z 2014-09-09T17:51:41Z 2000 2000 Thesis http://hdl.handle.net/1721.1/89285 46310295 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 208 leaves application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Mechanical Engineering.
spellingShingle	Mechanical Engineering. Hashemi, Fardad Ali, 1976- Design of a precision chemical mechanical planarization research system
description	Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. === Includes bibliographical references (leaf 208). === by Fardad Ali Hashemi. === S.M.
author2	Ernesto E. Blanco.
author_facet	Ernesto E. Blanco. Hashemi, Fardad Ali, 1976-
author	Hashemi, Fardad Ali, 1976-
author_sort	Hashemi, Fardad Ali, 1976-
title	Design of a precision chemical mechanical planarization research system
title_short	Design of a precision chemical mechanical planarization research system
title_full	Design of a precision chemical mechanical planarization research system
title_fullStr	Design of a precision chemical mechanical planarization research system
title_full_unstemmed	Design of a precision chemical mechanical planarization research system
title_sort	design of a precision chemical mechanical planarization research system
publisher	Massachusetts Institute of Technology
publishDate	2014
url	http://hdl.handle.net/1721.1/89285
work_keys_str_mv	AT hashemifardadali1976 designofaprecisionchemicalmechanicalplanarizationresearchsystem
_version_	1719032632480628736

Design of a precision chemical mechanical planarization research system

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