A complete MEMS analysis system and implementation
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. === Includes bibliographical references (p. 60). === by Xudong Tang. === S.M.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/86552 |
| id |
ndltd-MIT-oai-dspace.mit.edu-1721.1-86552 |
|---|---|
| record_format |
oai_dc |
| spelling |
ndltd-MIT-oai-dspace.mit.edu-1721.1-865522019-05-02T15:45:44Z A complete MEMS analysis system and implementation Complete microelectromechanical systems analysis system and implementation Tang, Xudong, 1967- Donald E. Troxel. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. Includes bibliographical references (p. 60). by Xudong Tang. S.M. 2014-05-07T16:48:55Z 2014-05-07T16:48:55Z 2000 2000 Thesis http://hdl.handle.net/1721.1/86552 46930195 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 79 p. application/pdf Massachusetts Institute of Technology |
| collection |
NDLTD |
| language |
English |
| format |
Others
|
| sources |
NDLTD |
| topic |
Electrical Engineering and Computer Science. |
| spellingShingle |
Electrical Engineering and Computer Science. Tang, Xudong, 1967- A complete MEMS analysis system and implementation |
| description |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. === Includes bibliographical references (p. 60). === by Xudong Tang. === S.M. |
| author2 |
Donald E. Troxel. |
| author_facet |
Donald E. Troxel. Tang, Xudong, 1967- |
| author |
Tang, Xudong, 1967- |
| author_sort |
Tang, Xudong, 1967- |
| title |
A complete MEMS analysis system and implementation |
| title_short |
A complete MEMS analysis system and implementation |
| title_full |
A complete MEMS analysis system and implementation |
| title_fullStr |
A complete MEMS analysis system and implementation |
| title_full_unstemmed |
A complete MEMS analysis system and implementation |
| title_sort |
complete mems analysis system and implementation |
| publisher |
Massachusetts Institute of Technology |
| publishDate |
2014 |
| url |
http://hdl.handle.net/1721.1/86552 |
| work_keys_str_mv |
AT tangxudong1967 acompletememsanalysissystemandimplementation AT tangxudong1967 completemicroelectromechanicalsystemsanalysissystemandimplementation AT tangxudong1967 completememsanalysissystemandimplementation |
| _version_ |
1719028015288025088 |