| Summary: | Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2013. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 115-118). === The development of an Autonomous Nano-stepping Tool (ANT) system is presented. Each ANT is a small, tripodal, robotic instrument capable of untethered precision motion within a quasi-three-dimensional workspace of arbitrary size. The project aimed to address limitations of conventional benchtop micro/nanoscale measurement and manipulation systems by offering a low-cost, scalable alternative with comparable performance and extended functionality and flexibility. The design, fabrication, and evaluation the various electrical, mechanical, and software subsystems are discussed. Device prototypes are introduced along with a platform-agnostic interface for remote monitoring and control. The device step size and its frequency dependence are examined. A novel, high-resolution capacitive probe concept is detailed and characterized as an example of an inexpensive, low-power, sensor technology with which an ANT may be equipped to perform scanning probe microscopy. Several positioning schemes are discussed, including a distributed vision-based approach which utilized a custom cross-correlation processor. === by Adam Joseph Wahab. === Ph. D.
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