Assessing the viability of various metallic microfabrication techniques
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. === Includes bibliographical references (p. 85-89). === An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of micro...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8460 |