Assessing the viability of various metallic microfabrication techniques

• Main Author: Hastings, Abel Z., 1973-
• Other Authors: Merton C. Flemings.
• Format: Others
• Language: English
• Published: Massachusetts Institute of Technology 2005
• Subjects: Materials Science and Engineering.
• Online Access: http://hdl.handle.net/1721.1/8460

Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. === Includes bibliographical references (p. 85-89). === An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, micro-injection molding, metal injection molding, Microforming, and microextrusion. This study presents a technique overview, assembly issues, an applications survey, basic cost modeling and a survey of the relevant intellectual property. === by Abel Z. Hastings. === M.Eng.