Finite element model of thermoelastic damping in MEMS
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. === Includes bibliographical references (p. 111). === Damping in MEMS resonators was studied experimentally and numerically. Quality factor measurements were performed on Draper gyroscopes made fr...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8458 |