Design, modeling, fabrication and testing of a piezoelectric microvalve for high pressure, high frequency hydraulic applications
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002. === Includes bibliographical references. === A piezoelectrically-driven hydraulic amplification microvalve for use in high specific power hydraulic pumping applications was designed, fabricated, and experi...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2005
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Online Access: | http://hdl.handle.net/1721.1/8332 |