Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators

Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 63-65). === In this thesis, the author introduces the first fully unreleased Micro-Electro-Mechanical (MEM) resonator, an...

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Bibliographic Details
Main Author: Wang, Wentao, Ph.D. Massachusetts Institute of Technology
Other Authors: Dana Weinstein and Carol Livermore.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2011
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/67806

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