Methods of improving the surface flatness of thin glass sheets and silicon wafers
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008. === Includes bibliographical references (p. 291-298). === The manufacturing of high quality sheet glass has allowed for many technologies to advance to astonishing frontiers. With dimensions reaching ~ 3 x...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/46484 |