Metrology of very thin silicon epitaxial films

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 135-139). === by Alexander Cherkassky. === Sc.D.

Bibliographic Details
Main Author:	Cherkassky, Alexander (Alexander Peter), 1963-
Other Authors:	Rafael Reif.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2009
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/46178

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-46178
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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-461782019-05-02T16:03:31Z Metrology of very thin silicon epitaxial films Cherkassky, Alexander (Alexander Peter), 1963- Rafael Reif. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 135-139). by Alexander Cherkassky. Sc.D. 2009-06-30T17:43:46Z 2009-06-30T17:43:46Z 1998 1998 Thesis http://hdl.handle.net/1721.1/46178 40328627 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 139 p. application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science
spellingShingle	Electrical Engineering and Computer Science Cherkassky, Alexander (Alexander Peter), 1963- Metrology of very thin silicon epitaxial films
description	Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 135-139). === by Alexander Cherkassky. === Sc.D.
author2	Rafael Reif.
author_facet	Rafael Reif. Cherkassky, Alexander (Alexander Peter), 1963-
author	Cherkassky, Alexander (Alexander Peter), 1963-
author_sort	Cherkassky, Alexander (Alexander Peter), 1963-
title	Metrology of very thin silicon epitaxial films
title_short	Metrology of very thin silicon epitaxial films
title_full	Metrology of very thin silicon epitaxial films
title_fullStr	Metrology of very thin silicon epitaxial films
title_full_unstemmed	Metrology of very thin silicon epitaxial films
title_sort	metrology of very thin silicon epitaxial films
publisher	Massachusetts Institute of Technology
publishDate	2009
url	http://hdl.handle.net/1721.1/46178
work_keys_str_mv	AT cherkasskyalexanderalexanderpeter1963 metrologyofverythinsiliconepitaxialfilms
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Metrology of very thin silicon epitaxial films

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