High resolution imaging and lithography using interference of light and surface plasmon waves
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2007. === Includes bibliographical references (leaf 28). === The resolution of optical imaging and lithography is limited by the wave nature of light. Studies have been undertaken to overcome the diffraction limit...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/42303 |