Gold-electroplating technology for X-ray-mask fabrication

Gold-electroplating technology for X-ray-mask fabrication

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. === Includes bibliographical references (p. 43-45). === by Kenneth W. Yee. === M.S.

Bibliographic Details
Main Author: Yee, Kenneth W. (Kenneth Wee-Koon)
Other Authors: Henry I. Smith.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2008
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/40601
id ndltd-MIT-oai-dspace.mit.edu-1721.1-40601
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spelling ndltd-MIT-oai-dspace.mit.edu-1721.1-406012019-05-02T16:17:56Z Gold-electroplating technology for X-ray-mask fabrication Yee, Kenneth W. (Kenneth Wee-Koon) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. Includes bibliographical references (p. 43-45). by Kenneth W. Yee. M.S. 2008-02-27T23:00:15Z 2008-02-27T23:00:15Z 1996 1996 Thesis http://hdl.handle.net/1721.1/40601 35994867 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 45 p. application/pdf Massachusetts Institute of Technology
collection NDLTD
language English
format Others
sources NDLTD
topic Electrical Engineering and Computer Science
spellingShingle Electrical Engineering and Computer Science
Yee, Kenneth W. (Kenneth Wee-Koon)
Gold-electroplating technology for X-ray-mask fabrication
description Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. === Includes bibliographical references (p. 43-45). === by Kenneth W. Yee. === M.S.
author2 Henry I. Smith.
author_facet Henry I. Smith.
Yee, Kenneth W. (Kenneth Wee-Koon)
author Yee, Kenneth W. (Kenneth Wee-Koon)
author_sort Yee, Kenneth W. (Kenneth Wee-Koon)
title Gold-electroplating technology for X-ray-mask fabrication
title_short Gold-electroplating technology for X-ray-mask fabrication
title_full Gold-electroplating technology for X-ray-mask fabrication
title_fullStr Gold-electroplating technology for X-ray-mask fabrication
title_full_unstemmed Gold-electroplating technology for X-ray-mask fabrication
title_sort gold-electroplating technology for x-ray-mask fabrication
publisher Massachusetts Institute of Technology
publishDate 2008
url http://hdl.handle.net/1721.1/40601
work_keys_str_mv AT yeekennethwkennethweekoon goldelectroplatingtechnologyforxraymaskfabrication
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