Low pressure epitaxial growth, fabrication and characterizion of Ge-on-Si photodiodes
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007. === Includes bibliographical references (p. 238-249). === In order to facilitate the integration of photonic systems onto an electronic chip, near infrared photodiodes utilizing novel...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2007
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Online Access: | http://hdl.handle.net/1721.1/38685 |