Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. === Includes bibliographical references (leaves 76-77). === by Jeffrey Wade Thomas. === M.S.

Bibliographic Details
Main Author:	Thomas, Jeffrey Wade
Other Authors:	James E. Chung.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2007
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/38062

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-38062
record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-380622019-05-02T16:13:01Z Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes Thomas, Jeffrey Wade James E. Chung. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (leaves 76-77). by Jeffrey Wade Thomas. M.S. 2007-07-18T13:31:08Z 2007-07-18T13:31:08Z 1995 1995 Thesis http://hdl.handle.net/1721.1/38062 33342500 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 127 leaves application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science
spellingShingle	Electrical Engineering and Computer Science Thomas, Jeffrey Wade Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. === Includes bibliographical references (leaves 76-77). === by Jeffrey Wade Thomas. === M.S.
author2	James E. Chung.
author_facet	James E. Chung. Thomas, Jeffrey Wade
author	Thomas, Jeffrey Wade
author_sort	Thomas, Jeffrey Wade
title	Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes
title_short	Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes
title_full	Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes
title_fullStr	Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes
title_full_unstemmed	Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes
title_sort	characterization of locos and oxidized mesa isolation in deep-sub micrometer soi nmos processes
publisher	Massachusetts Institute of Technology
publishDate	2007
url	http://hdl.handle.net/1721.1/38062
work_keys_str_mv	AT thomasjeffreywade characterizationoflocosandoxidizedmesaisolationindeepsubmicrometersoinmosprocesses
_version_	1719036352965640192

Characterization of LOCOS and oxidized mesa isolation in deep-sub micrometer SOI NMOS processes

Similar Items