A MEMS-based, high-resolution Electric-Field meter
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005. === Includes bibliographical references (p. 169-172). === In MEMS-based inertial sensors, such as accelerometers and gyroscopes, known electrical waveforms are applied to a modulating...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/33358 |