Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges

Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005. === Includes bibliographical references (p. 81-84). === This thesis addresses the construction of complex three-dimensional (3-D) nanostructures using only 2-D, planar nano-fabricatio...

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Bibliographic Details
Main Author: Arora, William Jay
Other Authors: George Barbastathis and Henry I. Smith.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2006
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/33107

Internet

http://hdl.handle.net/1721.1/33107

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